Gonjun Kim

Title: Innovations by Gonjun Kim in Semiconductor Manufacturing

Introduction

Gonjun Kim is a notable inventor based in Suwon-si, South Korea. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patent.

Latest Patents

Gonjun Kim holds a patent for a "Substrate processing apparatus including shower head and edge ring and related methods of manufacturing semiconductor devices." This patent outlines a manufacturing method that includes depositing a chamber protective layer in a chamber, supplying a first purge gas to the chamber, and transferring a substrate to the chamber. The substrate is disposed inside an edge ring on an electrostatic chuck. The method further involves processing the substrate, supplying a second purge gas to the chamber, and transferring the substrate outside of the chamber. The process concludes with the removal of the chamber protective layer and the supply of a third purge gas to the chamber. Notably, the variation of the surface roughness of the edge ring is minimal, and the flow rate ratio of gas supplied to the edge of the substrate compared to the central portion can range from 0.05 to 19.

Career Highlights

Gonjun Kim is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate in the semiconductor field. His work has been instrumental in enhancing manufacturing processes and improving the efficiency of semiconductor devices.

Collaborations

Gonjun has collaborated with notable colleagues, including Woorim Lee and Sunggil Kang, contributing to advancements in their shared field of expertise.

Conclusion

Gonjun Kim's innovative work in semiconductor manufacturing exemplifies the importance of continuous improvement in technology. His patent reflects a commitment to enhancing manufacturing methods, which is crucial for the advancement of the semiconductor industry.