Glenn W Travis

Title: Glenn W. Travis: Innovating Semiconductor Polishing Technology

Introduction

Glenn W. Travis is an accomplished inventor based in Sherman Oaks, California, who has made significant contributions to semiconductor processing technologies. With a total of 12 patents to his name, Travis has focused on innovations that enhance the effectiveness and efficiency of semiconductor wafer polishing.

Latest Patents

Travis's recent inventions include the "Linear Reciprocating Disposable Belt Polishing Method and Apparatus." This invention introduces an innovative apparatus for chemically mechanically planarizing a semiconductor wafer, utilizing a continuous polishing strip with abrasive surfaces. The design features a first drive roller that secures one end of the polishing strip, while a second drive roller holds the opposite end. Support rollers ensure that the second side of the polishing strip maintains contact, facilitating a bi-directional movement through an operably connected drive motor.

Another notable invention is the "Wafer Carrier Head Assembly," which addresses the requirements of chemical mechanical planarization applications. This assembly includes a downwardly protruding wafer retaining ring that operates independently of the wafer carrier head, effectively holding the edge of the wafer against the polishing surface. The assembly also boasts an adjustable wafer holding mechanism that can apply either a uniform downward or upward force, ensuring optimal retention and transport of the wafer to the polishing surface, while allowing for parallelism adjustments during the polishing process.

Career Highlights

Glenn W. Travis is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment manufacturing industry. His work at Lam Research focuses on developing technologies aimed at improving semiconductor manufacturing processes. His contributions have played a vital role in enhancing the performance and reliability of polishing equipment used in the industry.

Collaborations

Throughout his career, Travis has collaborated with notable colleagues, including Wilbur C. Krusell and Erik H. Engdahl. These partnerships have fostered an environment of innovation, allowing for the sharing of ideas and expertise crucial to advancing semiconductor technology.

Conclusion

With his impressive portfolio of patents and a dedication to innovation in semiconductor processing, Glenn W. Travis continues to influence the field significantly. His recent inventions demonstrate his commitment to enhancing wafer polishing methods, making them more efficient and effective for the ever-evolving semiconductor industry.