Company Filing History:
Years Active: 2004
Title: Glenn J Tessmer: Innovator in Semiconductor Technology
Introduction
Glenn J Tessmer is a notable inventor based in Richardson, TX (US), recognized for his contributions to semiconductor technology. He holds 2 patents that showcase his innovative approaches to improving semiconductor devices.
Latest Patents
One of his latest patents is titled "Nickel silicide—silicon nitride adhesion through surface passivation." This patent describes a process for forming nickel silicide and silicon nitride structures in semiconductor integrated circuit devices. Good adhesion between the nickel silicide and the silicon nitride is accomplished by passivating the nickel silicide surface with nitrogen. The passivation may be performed by treating the nickel silicide surface with plasma-activated nitrogen species. An alternative passivation method involves covering the nickel silicide with a film of metal nitride and heating the substrate to about 500°C. Another method includes sputter depositing silicon nitride on top of nickel silicide.
Another significant patent is "Method for reducing contamination, copper reduction, and depositing a dielectric layer on a semiconductor device." This invention relates to a method for improving the interface of a semiconductor device. The method comprises providing first and second substrates having an oxidized region and establishing a first loading position in a first process chamber. The first and second substrates are consecutively inserted into the first process chamber and generally simultaneously processed, wherein the oxidized region is reduced by exposure to a first plasma. The substrates are then removed and processed in a second chamber, maintaining throughput while optimizing the interface.
Career Highlights
Glenn J Tessmer is associated with Texas Instruments Corporation, a leading company in semiconductor technology. His work has significantly impacted the development of advanced semiconductor devices.
Collaborations
He has collaborated with notable colleagues, including Jiong-Ping Lu and Melissa M Hewson, contributing to various projects within the semiconductor field.
Conclusion
Glenn J Tessmer's innovative patents and contributions to semiconductor technology highlight his role as a key inventor in the industry. His work continues to influence advancements in semiconductor devices, showcasing the importance of innovation in this field.