Company Filing History:
Years Active: 2002-2004
Title: The Innovative Contributions of Gil Lund
Introduction
Gil Lund is a notable inventor based in Kent, WA (US). He has made significant contributions to the field of processing systems, particularly in the semiconductor industry. With a total of 3 patents to his name, Lund's work focuses on enhancing the efficiency and cleanliness of workpiece processing.
Latest Patents
Lund's latest patents include a multi-process system with a pivoting process chamber. This innovative system allows for the processing of workpieces within an inner chamber that is pivotably supported by an outer chamber. The design features an opening that enables liquid to drain out, while a motor pivots the inner chamber to facilitate this process. This method reduces the need to transfer workpieces between different apparatus, thereby minimizing the risk of contamination.
Another significant patent is for systems and methods for processing workpieces that require low levels of contamination, such as semiconductor wafers. In this design, workpieces are loaded into a rotor within a process chamber that has a horizontal drain opening. The chamber is designed to pivot or rotate, allowing the drain opening to move down to the liquid level, ensuring a uniform drainage rate. An organic solvent vapor is introduced to prevent droplets from remaining on the workpieces, while centrifugal force from the rotor aids in removing any residual droplets.
Career Highlights
Gil Lund is currently employed at Semitool, Inc., where he continues to innovate and develop advanced processing systems. His work has been instrumental in improving the efficiency of semiconductor manufacturing processes.
Collaborations
Lund collaborates with talented individuals such as Eric Lund and Dana R. Scranton, contributing to a dynamic work environment that fosters innovation.
Conclusion
Gil Lund's contributions to the field of processing systems are noteworthy, particularly in the semiconductor industry. His innovative patents reflect a commitment to enhancing efficiency and reducing contamination in workpiece processing. His work continues to influence advancements in technology and manufacturing processes.