This inventor holds 2 USPTO granted patents. Top assignees: Novellus Systems Incorporated, Varian Associates, Inc.. Active years: 1995-2003.
Company Filing History:
Years Active: 1995-2003
Title: Geri M Actor: Innovator in Sputtering Technology
Introduction
Geri M Actor is a prominent inventor based in Monte Sereno, CA (US). She has made significant contributions to the field of sputtering technology, holding 2 patents that showcase her innovative approach to material deposition processes.
Latest Patents
Geri's latest patents include a "Collimated Deposition Apparatus" and a "Method for Controlling a Collimated Sputtering Source." The collimated deposition apparatus utilizes a sputtering apparatus with a collimating filter to limit the angles at which sputtered particles reach the substrate. This design ensures a highly uniform emission of particles, enhancing the quality of the deposited films. The method for controlling a collimated sputtering source involves a computer-controlled system that compensates for the build-up of sputtered material on the collimator. This innovative approach allows for consistent film properties across multiple substrates, even as the collimator ages.
Career Highlights
Throughout her career, Geri has worked with notable companies such as Varian Associates, Inc. and Novellus Systems Incorporated. Her experience in these organizations has contributed to her expertise in sputtering technology and material science.
Collaborations
Geri has collaborated with esteemed colleagues, including Vance E Hoffman, Jr. and Stephen M Higa. These partnerships have further enriched her work and innovation in the field.
Conclusion
Geri M Actor's contributions to sputtering technology and her innovative patents reflect her dedication to advancing material deposition processes. Her work continues to influence the industry and inspire future innovations.