Company Filing History:
Years Active: 2000-2003
Title: Gerben Vrijburg: Innovator in Semiconductor Technology
Introduction
Gerben Vrijburg is a notable inventor based in Mesa, AZ, specializing in semiconductor technology. He holds 2 patents that focus on innovative methods for reducing particles in reactors, which are crucial for maintaining the integrity of semiconductor manufacturing processes.
Latest Patents
His latest patents include the "Substrate Handling Chamber" and the "System and Method for Reducing Particles in Epitaxial Reactors." The Substrate Handling Chamber patent describes an apparatus designed to minimize particle contamination in reactors. This apparatus features an enclosure with a wafer handling chamber connected to a processing chamber via an isolation gate valve. It employs pipes to deliver purge gas into the wafer handling chamber, effectively eliminating particles from the enclosure. A pilot-operated back pressure regulator manages the delivery and removal of the purge gas, while a Bernoulli wand is utilized for lifting and holding individual semiconductor wafers. The design also incorporates ionizers in the purge gas lines to discharge static electricity, preventing wafers from being attracted to one another.
The second patent, the "System and Method for Reducing Particles in Epitaxial Reactors," shares similar features with the first. It includes an enclosure for processing semiconductor wafers, a wafer handling chamber, and an isolation gate valve. The apparatus also utilizes a pilot-operated back pressure regulator and a Bernoulli wand for wafer handling. The innovative use of ionizers and an alpha particle emission source in the purge gas line ensures that static charges are neutralized, further enhancing the efficiency of the semiconductor manufacturing process.
Career Highlights
Gerben Vrijburg is currently employed at Asm America, Inc., where he continues to contribute to advancements in semiconductor technology. His work focuses on developing solutions that enhance the performance and reliability of semiconductor manufacturing equipment.
Collaborations
Throughout his career, Gerben has collaborated with notable colleagues, including Allan Doley and Dennis L Goodwin. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Gerben Vrijburg's contributions to semiconductor technology through his patents and collaborative efforts highlight his commitment to innovation in the field. His work continues to impact the industry positively, ensuring the advancement of semiconductor manufacturing processes.