This inventor holds 1 USPTO granted patent. Top assignee: Siemens Aktiengesellschaft. Active years: 1988.
Company Filing History:
Years Active: 1988
Title: Gerald Higelin: Innovator in Titanium Layer Production
Introduction
Gerald Higelin is a notable inventor based in Munich, Germany. He has made significant contributions to the field of materials science, particularly in the production of titanium and titanium nitride layers. His innovative methods have applications in various electronic components, enhancing their performance and reliability.
Latest Patents
Gerald Higelin holds a patent for a method for the production of a titanium/titanium nitride double layer. This method involves producing consecutive layers of titanium and titanium nitride on a substrate, creating a contact and barrier layer between materials such as aluminum and silicon surfaces. The process utilizes cathode sputtering in a one-chamber magnetron sputtering system. The titanium and titanium nitride layers are formed in a cyclical process, with temperature treatments conducted between the deposition of individual layers. Notably, during the deposition of the titanium nitride layer, the nitrogen concentration in the reaction gas is adjusted to be higher than the stoichiometric requirement for titanium nitride production. The resulting combined layers offer low mechanical stress, good thermal stability, and low contact resistance, making them suitable for megabit-DRAM cells and logic circuits. He has 1 patent to his name.
Career Highlights
Gerald Higelin is currently employed at Siemens Aktiengesellschaft, where he continues to develop innovative solutions in materials science. His work has significantly impacted the production processes within the company, contributing to advancements in electronic components.
Collaborations
Gerald has collaborated with Armin Kohlhase, working together to enhance the efficiency and effectiveness of their research and development efforts.
Conclusion
Gerald Higelin's contributions to the field of titanium layer production exemplify the importance of innovation in materials science. His patented methods not only improve the performance of electronic components but also pave the way for future advancements in the industry.