Company Filing History:
Years Active: 2000-2003
Title: George A. Mueller: Innovator in Plasma Processing Technology
Introduction
George A. Mueller is a prominent inventor based in San Jose, CA (US), known for his significant contributions to plasma processing technology. With a total of 5 patents, Mueller has made strides in improving semiconductor processing techniques, which are crucial for the advancement of modern electronics.
Latest Patents
One of his latest patents is the "Perforated Plasma Confinement Ring in Plasma Reactors." This invention relates to a plasma processing reactor apparatus designed for semiconductor processing of substrates. The apparatus features a chamber, a top electrode connected to a first RF power source, and a bottom electrode linked to a second RF power source with a lower frequency. Additionally, it includes an insulating shroud lining the chamber's interior and a perforated plasma confinement ring positioned outside the bottom electrode's periphery, which is electrically grounded during processing.
Another notable patent is "Techniques for Improving Etching in a Plasma Processing Chamber." This invention presents improved methods and apparatus for chemically assisted etch processing in plasma systems. The techniques aim to reduce critical dimension bias associated with the etch process, allowing for accurate etching of features with higher aspect ratios. Furthermore, these methods help mitigate undesired effects such as micro loading, bowing, and passivation.
Career Highlights
George A. Mueller is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on developing innovative solutions that enhance the efficiency and effectiveness of plasma processing technologies.
Collaborations
Throughout his career, Mueller has collaborated with talented individuals such as Lumin Li and Thomas D. Nguyen. These partnerships have contributed to the advancement of his research and the successful development of his patented technologies.
Conclusion
George A. Mueller's contributions to plasma processing technology have significantly impacted the semiconductor industry. His innovative patents and collaborative efforts continue to drive advancements in this critical field.