Kudamatsu, Japan

Gen Marumoto


Average Co-Inventor Count = 5.3

ph-index = 3

Forward Citations = 102(Granted Patents)


Company Filing History:


Years Active: 1986-1992

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3 patents (USPTO):Explore Patents

Title: **Gen Marumoto: Innovator in Plasma Treatment Technology**

Introduction

Gen Marumoto, an accomplished inventor based in Kudamatsu, Japan, has made significant contributions to the field of plasma treatment technology. With a total of three patents to his name, Marumoto's innovations have notably enhanced the accuracy and efficiency of etching processes in various applications.

Latest Patents

Marumoto's latest patents include two groundbreaking inventions. The first patent is an **Apparatus for Detecting an End Point of Etching**. This invention presents a method for detecting the end point of etching through emission spectroscopy. By utilizing a constant ratio between emission intensities during and after treatment, Marumoto's method computes correction values ensuring consistent detection levels, ultimately enabling precise endpoint detection regardless of emission quantity fluctuations.

The second patent is a **Method of and Apparatus for Detecting an End Point of Plasma Treatment**. This innovative design involves selecting a plasma spectrum with a specific wavelength during plasma treatment. It employs a series of computational steps, including the calculation of a secondary differential value derived from the selected plasma spectrum and the reaction time of the specimen. By comparing this value against preset reference values, the apparatus reliably detects the endpoint of the plasma treatment, achieving high accuracy despite varying reaction curves.

Career Highlights

Gen Marumoto has notably worked with prestigious companies such as Hitachi, Ltd. and Hitachi Sanki Engineering Co., Ltd. His professional trajectory reflects a commitment to advancing plasma technologies and enhancing industrial processes.

Collaborations

Throughout his career, Marumoto has collaborated with talented individuals, including his coworkers Keiji Tada and Fumio Shibata. Their collective efforts in research and development have contributed to successful innovations within their field.

Conclusion

In conclusion, Gen Marumoto's impact on plasma treatment technology through his patents signifies a blend of creativity and technical expertise. His work not only reflects his dedication as an inventor but also positions him as a key player in advancing industrial applications of plasma technologies.

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