This inventor holds 1 USPTO granted patent. Top assignee: Applied Materials, Inc.. Active years: 2025.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2025
Title: Gautham Bammanahalli: Innovator in Electrostatic Chuck Technology
Introduction
Gautham Bammanahalli is a notable inventor based in Santa Clara, CA (US). He has made significant contributions to the field of electrostatic chuck technology, particularly with his innovative approaches to substrate handling.
Latest Patents
Gautham holds a patent for a "Soft-chucking scheme for improved backside particle performance." This patent outlines methods for chucking and de-chucking a substrate, which includes applying a first voltage to a chucking electrode during a chucking time interval. It also involves supplying an inert gas at a first pressure to the backside of the substrate during this interval, followed by applying a higher second voltage and increasing the inert gas pressure after the chucking time interval.
Career Highlights
Gautham is currently employed at Applied Materials, Inc., where he continues to develop and refine technologies that enhance substrate performance in various applications. His work has been instrumental in advancing the capabilities of electrostatic chucks.
Collaborations
Gautham collaborates with talented professionals such as Tony Jefferson Gnanaprakasa and Alvaro Garcia, contributing to a dynamic team focused on innovation and excellence in their field.
Conclusion
Gautham Bammanahalli's contributions to electrostatic chuck technology exemplify his commitment to innovation and improvement in substrate handling processes. His patent and ongoing work at Applied Materials, Inc. highlight his role as a key figure in this technological domain.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile