This inventor holds 1 USPTO granted patent. Top assignee: Applied Materials, Inc.. Active years: 2005.
Company Filing History:
Years Active: 2005
Title: Gary R Ahr: Innovator in Endpoint Detection Technology
Introduction
Gary R Ahr is a notable inventor based in Modesto, CA (US). He has made significant contributions to the field of technology, particularly in the area of endpoint detection in processing chambers. His innovative approach has led to advancements that enhance the efficiency of cleaning processes in various applications.
Latest Patents
Gary R Ahr holds a patent for a method and apparatus designed to determine the endpoint of a cleaning process running in a chamber. The patent, titled "Process Endpoint Detection in Processing Chambers," outlines a method that includes several key steps. These steps involve directing radiation absorbed by a byproduct of the cleaning process into an exhaust line of the chamber. Additionally, the method includes detecting a measure of absorbance of the radiation by the byproduct and determining the endpoint when the measure of absorbance falls within a predetermined window. This innovative solution addresses critical challenges in the cleaning process, ensuring optimal performance and reliability.
Career Highlights
Gary R Ahr is associated with Applied Materials, Inc., a leading company in the semiconductor and display industries. His work at Applied Materials has allowed him to apply his expertise in developing cutting-edge technologies that improve manufacturing processes. With a focus on innovation, Gary has contributed to the advancement of technologies that are essential for modern manufacturing.
Collaborations
Gary has collaborated with Laxman Murugesh, a fellow innovator in the field. Their partnership has fostered the exchange of ideas and expertise, leading to further advancements in their respective areas of work.
Conclusion
In summary, Gary R Ahr is a distinguished inventor whose work in endpoint detection technology has made a significant impact on the industry. His innovative patent and contributions to Applied Materials, Inc. highlight his commitment to advancing technology and improving manufacturing processes.