Company Filing History:
Years Active: 1983
Title: Gary P Green: Innovator in Particle Detection Technology
Introduction
Gary P Green is a notable inventor based in Marlborough, MA (US). He has made significant contributions to the field of particle detection technology, particularly in the semiconductor industry. His innovative approach has led to the development of a unique method and apparatus for detecting impurities on material surfaces.
Latest Patents
Gary P Green holds a patent for a "Method and apparatus for detecting particles on a material." This invention provides a sophisticated method for detecting and measuring the number and sizes of impurities on surfaces, such as semiconductor wafers. The system utilizes high-intensity collimated light directed onto the surface, allowing for the detection of particles as small as 0.3 microns. The technology employs a highly light-sensitive TV camera to capture scattered light, which indicates particle size when compared to a calibrated model.
Career Highlights
Gary is associated with Hamamatsu Systems, Inc., where he applies his expertise in particle detection. His work has been instrumental in enhancing the quality control processes in semiconductor manufacturing. His innovative methods have paved the way for more efficient inspections of wafer surfaces.
Collaborations
Gary has collaborated with notable colleagues, including Charly D Allemand and David L Brewer. Their combined efforts have contributed to advancements in the field of particle detection and measurement.
Conclusion
In summary, Gary P Green is a distinguished inventor whose work in particle detection technology has had a significant impact on the semiconductor industry. His innovative methods continue to enhance the quality and efficiency of material inspections.