Underhill, VT, United States of America

Gary Joseph Beardsley


Average Co-Inventor Count = 4.0

ph-index = 5

Forward Citations = 59(Granted Patents)


Company Filing History:


Years Active: 2000-2002

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6 patents (USPTO):Explore Patents

Title: Innovations by Gary Joseph Beardsley

Introduction

Gary Joseph Beardsley is a notable inventor based in Underhill, Vermont, with a significant contribution to the field of semiconductor technology. He holds a total of 6 patents, showcasing his expertise and innovative spirit in developing advanced methods for semiconductor fabrication.

Latest Patents

Among his latest patents is a method for homogenizing device parameters through photoresist planarization. This invention involves disposing photoresist over a semiconductor substrate, which is then planarized through chemical mechanical polishing to achieve uniform thickness. The process ensures that the recess depths in different trenches are substantially equal, facilitating consistent parameters and performance in the fabricated semiconductor devices. Another significant patent is a post-CMP cleaning method using a brush cleaner with a torque monitor. This method detects the presence of a brush in a semiconductor wafer cleaner, ensuring effective cleaning by monitoring torque changes during the cleaning cycle. If the torque remains constant, it indicates that the brush is not contacting the wafer, prompting the user to reaffix the brush.

Career Highlights

Gary Beardsley is associated with the International Business Machines Corporation (IBM), where he has made substantial contributions to semiconductor technology. His work has been pivotal in enhancing the efficiency and effectiveness of semiconductor fabrication processes.

Collaborations

Throughout his career, Gary has collaborated with talented individuals such as Cuc Kim Huynh and David Louis Walker, contributing to various innovative projects within the semiconductor industry.

Conclusion

Gary Joseph Beardsley exemplifies the spirit of innovation in the semiconductor field through his patents and contributions at IBM. His work continues to influence the development of advanced semiconductor technologies, ensuring consistent performance and reliability in electronic devices.

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