Gary Gragg

Title: Gary Gragg: Innovator in Substrate Processing Systems

Introduction

Gary Gragg is a notable inventor based in San Jose, California. He has made significant contributions to the field of substrate processing systems. His innovative work has led to the development of a patented technology that enhances the efficiency and effectiveness of these systems.

Latest Patents

Gary Gragg holds a patent for a "Wide-coverage edge ring for enhanced shielding in substrate processing systems." This invention features a wide-coverage edge ring designed to be positioned above a bottom ring in a substrate processing chamber. The edge ring includes an upper surface and a lower surface with a step that interfaces with a pocket defined by the bottom ring and chamber liner. The design also incorporates an inner diameter, a ledge, and an outer diameter with a projection that extends radially outward. This projection is crucial for interfacing with the upper end of the chamber liner, thereby improving the overall shielding and processing capabilities.

Career Highlights

Gary Gragg is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to focus on innovations that drive advancements in substrate processing technologies.

Collaborations

Throughout his career, Gary has collaborated with talented individuals such as Giovanni Paolo Gajudo and Shang-I Chou. These collaborations have contributed to the development of cutting-edge technologies in the field.

Conclusion

In summary, Gary Gragg is a distinguished inventor whose work in substrate processing systems has led to valuable innovations. His patent for the wide-coverage edge ring exemplifies his commitment to enhancing technology in this critical area.