Company Filing History:
Years Active: 2016-2017
Title: Innovations of Gary Fan
Introduction
Gary Fan is an accomplished inventor based in Fremont, CA. He has made significant contributions to the field of electron beam inspection technology. With a total of 3 patents to his name, Gary has demonstrated his expertise and innovative spirit in developing advanced systems for defect detection.
Latest Patents
Gary Fan's latest patents include a "Method and system for adaptively scanning a sample during electron beam inspection." This patent describes a system that utilizes an inspection sub-system to scan an electron beam across the surface of a sample. The system comprises an electron beam source, a sample stage, electron-optic elements, a detector assembly, and a controller that adjusts scan parameters based on the characteristics of the sample.
Another notable patent is "Enhanced defect detection in electron beam inspection and review." This invention involves an electron beam apparatus that generates a primary electron beam and utilizes an electron-optics system to focus the beam onto a sample. The detection system captures signal-carrying electrons, and an image processing system processes the data. A host computer coordinates the operations of the apparatus, enhancing the efficiency of defect detection.
Career Highlights
Gary Fan is currently employed at KLA-Tencor Corporation, where he continues to innovate in the field of electron beam inspection. His work has significantly impacted the industry, leading to advancements in defect detection and review processes.
Collaborations
Gary has collaborated with notable colleagues, including Hong Xiao and David Chen, contributing to various projects and innovations within the company.
Conclusion
Gary Fan's contributions to electron beam inspection technology highlight his role as a leading inventor in the field. His innovative patents and career at KLA-Tencor Corporation reflect his commitment to advancing technology and improving defect detection methods.