This inventor holds 3 USPTO granted patents. Top assignee: Motorola Corporation. Active years: 1991-1998.
Company Filing History:
Years Active: 1991-1998
Title: Gary A DePinto: Innovator in Semiconductor Technology
Introduction
Gary A DePinto is a notable inventor based in Austin, TX (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on methods that enhance the efficiency and environmental sustainability of wafer processing facilities.
Latest Patents
One of Gary's latest patents is a method and apparatus for using molten aluminum to abate PFC gases. This innovative application is dedicated to the public and aims to reduce emissions of fluorinated gases from wafer processing facilities. The process involves providing a fluorinated exhaust gas from wafer processing tools, which is then optionally gettered to remove oxygen. The exhaust gas is directed to a molten aluminum bath, where the fluorine reacts with aluminum to form AlF3. A measurement device monitors the fluorine levels, ensuring that when the bath is saturated, it can be cooled to form an inert solid brick of AlF3. This method effectively removes harmful fluorinated gases from the environment.
Another significant patent by Gary is a method for vapor drying semiconductor substrates. This invention utilizes a multi-directional flow of isopropyl alcohol vapor to uniformly dry the substrate. The vapor is injected at the top of the substrate while internally generated vapors are directed toward the bottom, allowing for simultaneous drying of both sides.
Career Highlights
Gary A DePinto is currently employed at Motorola Corporation, where he continues to innovate in the semiconductor industry. His work has not only advanced technology but also contributed to environmental sustainability in manufacturing processes.
Collaborations
Throughout his career, Gary has collaborated with notable colleagues, including John G Franka and Harry S Morgan. These partnerships have fostered a creative environment that encourages innovation and the development of groundbreaking technologies.
Conclusion
Gary A DePinto is a distinguished inventor whose work in semiconductor technology has led to significant advancements in environmental sustainability. His innovative patents reflect his commitment to improving manufacturing processes and reducing harmful emissions.