This inventor holds 1 USPTO granted patent and 1 EPO patent. Top assignee: Oxford Instruments Nanotechnology Tools Limited. Active years: 2025.
Company Filing History:
Years Active: 2025
Title: Gareth Waters - Innovator in Plasma Processing Technology
Introduction
Gareth Waters is a notable inventor based in Bassaleg, GB. He has made significant contributions to the field of plasma processing technology, particularly with his innovative designs and patents. His work focuses on enhancing the efficiency and effectiveness of plasma generation tools.
Latest Patents
Gareth Waters holds a patent for an "Electrode array," which describes a plasma generation electrode array for a plasma processing tool. This tool comprises a processing chamber and a substrate table that supports a substrate for material deposition and etching. The electrode array features a plurality of ground electrodes and at least one live electrode, arranged in an alternating pattern along a first direction in a plane parallel to the substrate table. The design ensures that the ground electrodes are positioned closer to the substrate table than the live electrodes, optimizing the plasma processing capabilities.
Career Highlights
Throughout his career, Gareth has focused on developing advanced technologies that improve plasma processing tools. His innovative approach has led to the creation of efficient designs that are crucial for various applications in material science and engineering.
Collaborations
Gareth has collaborated with talented individuals such as Gary Proudfoot and Annika Peter, contributing to the advancement of plasma processing technologies through teamwork and shared expertise.
Conclusion
Gareth Waters is a distinguished inventor whose work in plasma processing technology has led to significant advancements in the field. His patent for the electrode array exemplifies his innovative spirit and commitment to improving technological processes.