Company Filing History:
Years Active: 2001-2003
Title: Inventor Profile: Gabriel I Font-Rodriguez
Introduction
Gabriel I Font-Rodriguez is an innovative inventor based in Sunnyvale, California. He has made significant contributions to the field of plasma reactor technology, holding three patents that demonstrate his expertise and creativity in engineering.
Latest Patents
One of his most recent patents is titled "Apparatus and Method for Injecting and Modifying Gas Concentration of a Meta-stable or Atomic Species in a Downstream Plasma Reactor." This invention revolves around an apparatus that injects gas into a plasma reactor and tailors the distribution of active species generated by a remote plasma source. This technology allows for versatile distribution configurations, including uniform, wafer-edge concentrated, and wafer-center concentrated layouts. A specialized contoured plate, known as a profiler, modifies this distribution effectively.
The profiler is designed with an axially symmetric plate that features a narrow top and wider bottom to redistribute the gas flow impacting it. The method includes predetermining the profiler's diameter and adjusting its height over the substrate for optimal performance. Additionally, the invention includes a coaxial injector tube that enables concurrent injection of activated and non-activated gas species, ensuring they are delivered in an axially symmetric manner. This technology enhances the efficiency of gas excitation in high-density RF plasma while preventing unwanted reactions in non-excited gases.
Career Highlights
Gabriel works at Novellus Systems Incorporated, where he applies his expertise to advance plasma technology. His innovative work has made a substantial impact on the semiconductor manufacturing industry, particularly in processing techniques that rely on plasma reactors.
Collaborations
Throughout his career, Gabriel has collaborated with notable individuals such as Ronald Allan Powell and Simon I Selitser. These partnerships have contributed to the development of groundbreaking technologies and have fostered a climate of innovation within their field.
Conclusion
Gabriel I Font-Rodriguez exemplifies the spirit of innovation and creativity in engineering. His patents not only showcase his technical skills and knowledge but also enhance technological processes in significant ways. As he continues to push the boundaries of plasma reactor applications, he remains an influential figure in the world of invention and technology.