Company Filing History:
Years Active: 2011-2014
Title: G Grant Peng: Innovator in Plasma Processing Technology
Introduction
G Grant Peng is a notable inventor based in Fremont, CA, who has made significant contributions to the field of plasma processing technology. With a total of 3 patents to his name, he has developed innovative solutions that enhance the performance and efficiency of plasma processing equipment.
Latest Patents
One of his latest patents is titled "Actively heated aluminum baffle component having improved particle performance and methods of use and manufacture thereof." This invention involves an actively heated aluminum baffle component, such as a thermal control plate or baffle ring of a showerhead electrode assembly in a plasma processing chamber. The component features an exposed outer aluminum oxide layer formed through an electropolishing procedure, which minimizes defects and particles generated during plasma processing.
Another significant patent is "Methods for correlating gap value to meniscus stability in processing of a wafer surface by a recipe-controlled meniscus." This patent provides methods for monitoring meniscus processing of a wafer surface to stabilize the meniscus. The process is responsive to a current recipe that defines a desired gap between the wafer surface and a proximity head. The method includes monitoring the current meniscus processing to determine if the gap deviates from the desired value and identifying a calibration recipe that specifies the current gap.
Career Highlights
G Grant Peng is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on developing advanced technologies that improve the efficiency and reliability of plasma processing systems.
Collaborations
Throughout his career, G Grant Peng has collaborated with talented professionals, including Cristian Paduraru and Katrina Mikhaylich, who have contributed to his innovative projects.
Conclusion
G Grant Peng's contributions to plasma processing technology through his patents and work at Lam Research Corporation highlight his role as a key innovator in the field. His inventions not only advance technology but also pave the way for future developments in semiconductor manufacturing.