Location History:
- Fuchu, JP (1990 - 2000)
- Tokyo, JP (1987 - 2002)
- late of Fuchu, JP (2001 - 2003)
Company Filing History:
25 out of 52,711 
1 out of 2,916 
Years Active: 1987-2003
Title: Fumio Komatsu – Innovator in Pattern Measurement Technology
Introduction
Fumio Komatsu, a prolific inventor based in Fuchu, Japan, has made significant contributions to the field of pattern measurement technology with a total of 26 patents to his name. His work focuses on innovative methodologies for measuring fine patterns using advanced electron microscope technologies.
Latest Patents
Among his latest patents are a "Pattern Dimension Measuring System" and a "Pattern Dimension Measuring Method." The pattern dimension measuring system comprises components such as a stage, an electron gun part, and electron lens systems designed for scanning an electron beam on a sample. This system incorporates real-time measurement capabilities, utilizing a laser interferometer to track the stage's coordinates and an optical lever system for measuring variances in working distance. The electronic beam is carefully mapped to ensure optimal focus while scanning, enabling the acquisition of high-resolution SEM images. Furthermore, his method for measuring the size of fine patterns uses a scanning electron microscope to determine the sizes of multiple patterns while ensuring that only compliant patterns are measured based on pre-established criteria.
Career Highlights
Fumio Komatsu has had a distinguished career with significant roles at prominent companies such as Kabushiki Kaisha Toshiba and Tokyo Shibaura Denki Kabushiki Kaisha. His expertise in electronics and measurement technology has allowed him to push the boundaries of precision in the industry.
Collaborations
Throughout his career, Komatsu has worked alongside notable colleagues, including Motosuke Miyoshi and Katsuya Okumura. These collaborations have contributed to the enhancement of his technological innovations and have further established his reputation in the research community.
Conclusion
With a strong portfolio of patents and a dedication to advancing measurement technology, Fumio Komatsu remains a pivotal figure in the innovation landscape. His developments in pattern measurement systems not only showcase his exceptional skills as an inventor but also play a crucial role in the future of electron microscopy and materials science.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.