The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 1998
Filed:
Aug. 20, 1997
Applicant:
Inventors:
Fumio Komatsu, Fuchu, JP;
Hiroshi Motoki, Kawasaki, JP;
Assignee:
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250310 ; 25044111 ;
Abstract
An electron microscope comprises: a electron optical column 5 for allowing an electron beam aligned and focused by a lens 2, 3, 4 to pass therethrough; a specimen chamber 8 for receiving therein a sample 7 which is irradiated with the electron beam passing through the electron optical column; and a separating thin film 6, mounted so as to close an opening of the electron optical column on the side of the specimen chamber, for separating the electron optical column from the specimen chamber in a vacuum level.