Company Filing History:
Years Active: 2017
Title: Fumiko Yokouchi: Innovator in Gas Supply Systems
Introduction
Fumiko Yokouchi is a prominent inventor based in Miyagi, Japan. She has made significant contributions to the field of gas supply systems, particularly in the processing of substrates. Her innovative approach has led to the development of a unique gas supply method that enhances processing efficiency.
Latest Patents
Fumiko Yokouchi holds 1 patent for her invention titled "Gas supply method." This patent describes a gas supply system designed for supplying gas into a processing chamber. The system includes a processing gas supply unit, a processing gas supply line, a first and a second branch line, a branch flow control unit, an additional gas supply unit, an additional gas supply line, and a control unit. The control unit is responsible for managing the gas supply before processing the substrate, ensuring that the additional gas is supplied at an initial flow rate greater than the set flow rate, followed by the set flow rate after a specified period.
Career Highlights
Fumiko Yokouchi is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. Her work focuses on advancing gas supply technologies that are critical for substrate processing.
Collaborations
Fumiko has collaborated with notable colleagues, including Shinichiro Hayasaka and Ken Horiuchi. Their teamwork has contributed to the successful development and implementation of innovative gas supply solutions.
Conclusion
Fumiko Yokouchi's contributions to gas supply systems exemplify her dedication to innovation in the field. Her patent and collaborative efforts highlight her role as a key figure in advancing technology within the industry.