Location History:
- Miyagi, JP (2009)
- Miyagi-gun, JP (2011 - 2014)
Company Filing History:
Years Active: 2009-2014
Title: Fumiko Yagi: Innovator in Substrate Processing Technology
Introduction
Fumiko Yagi is a prominent inventor based in Miyagi-gun, Japan. She has made significant contributions to the field of substrate processing technology, holding a total of 4 patents. Her innovative work has advanced the efficiency and effectiveness of gas supply systems and substrate processing apparatuses.
Latest Patents
Fumiko Yagi's latest patents include a gas supply system designed for supplying gas into a processing chamber for substrate processing. This system features a processing gas supply unit, a processing gas supply line, and a control unit that manages the flow of gas during the processing of substrates. Another notable patent is for a substrate processing apparatus that includes a recipe protection unit, which prohibits changes to processing conditions while a process is being performed on a specific number of substrates. This innovation ensures consistency and reliability in substrate processing.
Career Highlights
Fumiko Yagi is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. Her work at the company has allowed her to develop and refine her inventions, contributing to advancements in substrate processing technologies.
Collaborations
Fumiko has collaborated with notable coworkers, including Takeshi Yokouchi and Shinichiro Hayasaka. Their teamwork has fostered an environment of innovation and creativity, leading to the development of cutting-edge technologies in their field.
Conclusion
Fumiko Yagi's contributions to substrate processing technology exemplify her dedication to innovation and excellence. Her patents reflect her expertise and commitment to advancing the industry.