Company Filing History:
Years Active: 2018-2019
Title: **Fumihiro Gobou: Innovator in Electrostatic Chuck Technology**
Introduction
Fumihiro Gobou is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of electrostatic chuck devices, with a total of two patents to his name. His innovative designs improve the efficiency and performance of these devices, making him a notable figure in the industry.
Latest Patents
Fumihiro Gobou's latest patents include two distinct electrostatic chuck devices. The first patent discloses an electrostatic chuck device aimed at increasing the electrostatic adsorptive force for a focus ring. This design features a mounting table that incorporates a holder around the periphery of the placing surface, along with banks and an annular groove formed between them. The innovation lies in the incorporation of micro-protruding parts with multiple micro-protrusions, which electrostatically adsorb the focus ring while ensuring uniform cooling.
The second patent also focuses on an electrostatic chuck device, specifically designed to adsorb a plate-like specimen with an electrostatic adsorption electrode. This device consists of a ceramic sintered body with a placement surface featuring protrusions to support the specimen. The structure of the protrusions allows for an increasing cross-sectional area that ensures stability and efficient cooling of the plate-like specimen.
Career Highlights
Fumihiro Gobou is currently associated with Sumitomo Osaka Cement Co., Ltd., a company known for its innovative materials and technologies. His work recognizes the crucial role of electrostatic chuck devices in various applications, particularly in the semiconductor and electronics industries. Gobou's patents are testaments to his expertise and commitment to innovation in his field.
Collaborations
In his career, Fumihiro Gobou has collaborated with talented colleagues such as Hitoshi Kouno and Kentaro Takahashi. Their combined efforts contribute to the advancement of technology and the development of successful patent applications that highlight their expertise in engineering and innovation.
Conclusion
Fumihiro Gobou's inventiveness in the realm of electrostatic chuck devices plays a significant role in the evolution of modern technology. His contributions are not only valuable for his company but also serve as a stepping stone for future advancements in the industry. With his ongoing work, the innovations brought forth by Gobou and his collaborators are sure to impact the field positively in the years to come.