Yokkaichi, Japan

Fumihiko Akaboshi


Average Co-Inventor Count = 5.0

ph-index = 1


Company Filing History:


Years Active: 2014

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1 patent (USPTO):Explore Patents

Title: Fumihiko Akaboshi: Innovator in Semiconductor Manufacturing

Introduction

Fumihiko Akaboshi is a notable inventor based in Yokkaichi, Japan. He has made significant contributions to the field of semiconductor manufacturing, showcasing his expertise through innovative methods and technologies.

Latest Patents

One of Akaboshi's key patents is titled "Method of manufacturing semiconductor device." This patent outlines a process that includes mounting a substrate on an electrostatic chuck within a chamber. The electrostatic chuck operates at a first temperature, while the substrate is initially retained in an atmosphere at a second temperature that is lower than the first. The method involves fixing the substrate onto the electrostatic chuck by applying a voltage, followed by heating the chuck to a third temperature that exceeds both the first and second temperatures. After this heating process, the substrate undergoes further processing.

Career Highlights

Fumihiko Akaboshi is associated with Fujitsu Corporation, where he has been able to apply his innovative ideas in a practical setting. His work has contributed to advancements in semiconductor technology, which is crucial for various electronic applications.

Collaborations

Throughout his career, Akaboshi has collaborated with talented individuals such as Masanori Terahara and Hikaru Kokura. These collaborations have likely enhanced his research and development efforts, leading to more refined and effective solutions in semiconductor manufacturing.

Conclusion

Fumihiko Akaboshi stands out as a significant figure in the semiconductor industry, with his innovative patent and contributions to Fujitsu Corporation. His work continues to influence the field, paving the way for future advancements in technology.

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