Company Filing History:
Years Active: 1991-1992
Title: Innovations by Fred Wong in Reaction Chamber Technology
Introduction
Fred Wong is an accomplished inventor based in Fremont, CA, known for his contributions to the field of reaction chamber technology. With a total of 2 patents, Wong has developed innovative methods and devices that enhance the efficiency of chemical reactions, particularly in semiconductor processing.
Latest Patents
Wong's latest patents include a "Reaction chamber with controlled radiant energy heating and distributed" and a "Method for high temperature thermal processing with reduced convective." The first patent describes a reaction chamber designed to provide controlled distribution of radiant energy over a sample's reaction surface. This design helps offset radiant heat loss and ensures uniform reactant flow. The chamber features a lamp housing that supplies radiant energy, with a support member that is transparent to the radiant energy, preventing it from acting as a heat absorber. The array of lamps is strategically positioned to optimize energy transmission to the sample.
The second patent outlines a method for inducing reactions in a substrate within a reaction chamber. This method involves heating the substrate to achieve a balanced temperature distribution while mixing a reactive carrier with an inert gas. The use of an inert gas with a lower specific heat reduces convective heat loss and thermal gradients, making it particularly effective for rapid thermal processing of semiconductor wafers.
Career Highlights
Fred Wong is currently employed at Rapro Technology, where he continues to innovate in the field of reaction chamber technology. His work has significantly impacted the efficiency of semiconductor manufacturing processes.
Collaborations
Wong has collaborated with notable colleagues, including Yen-Hui Ku and Ahmad Kermani, contributing to advancements in their shared field of expertise.
Conclusion
Fred Wong's innovative patents and contributions to reaction chamber technology demonstrate his commitment to enhancing chemical processing methods. His work continues to influence the semiconductor industry and improve manufacturing efficiency.