Frank R Hassell

Title: Frank R. Hassell: Innovator in EUV Technology

Introduction

Frank R. Hassell is a notable inventor based in Torrance, California. He has made significant contributions to the field of extreme ultraviolet (EUV) technology. His innovative work has led to the development of a unique patent that enhances the efficiency of EUV radiation sources.

Latest Patents

Hassell holds a patent for a Monolithic Silicon EUV Collector. This invention features a collector optic assembly designed for EUV radiation sources. The assembly includes an elliptical meniscus with a reflective Si/Mo coating, which is essential for collecting and reflecting EUV radiation generated by the source. The meniscus is machined from a single piece of silicon, ensuring high precision and performance. Additionally, the collector optic assembly incorporates a heat exchanger with cooling channels that circulate a liquid coolant. This heat exchanger is fabricated from multiple machined silicon sections that are fused together using a glass frit bonding process. The meniscus is bonded to the front side of the heat exchanger, while the liquid coolant inlet and outlet manifolds are also machined from a single silicon block and mounted to the back side of the heat exchanger. This innovative design enhances the overall efficiency of the EUV collector system.

Career Highlights

Frank R. Hassell is affiliated with the University of Central Florida Research Foundation, Inc. His work at this institution has allowed him to focus on cutting-edge research in the field of optics and radiation technology. His contributions have been instrumental in advancing the capabilities of EUV systems.

Collaborations

Hassell has collaborated with Jonathan W. Arenberg, a fellow innovator in the field. Their partnership has fostered advancements in EUV technology and has contributed to the development of new solutions in the industry.

Conclusion

Frank R. Hassell's innovative work in the field of EUV technology exemplifies the impact of dedicated research and development. His patent for the Monolithic Silicon EUV Collector showcases his commitment to enhancing the efficiency of radiation sources. Through his career at the University of Central Florida Research Foundation, Inc., he continues to contribute to significant advancements in this vital area of technology.