Company Filing History:
Years Active: 2000
Title: Frank B Van Bilsen: Innovator in Wafer Support Systems
Introduction
Frank B Van Bilsen is a notable inventor based in Phoenix, AZ. He has made significant contributions to the field of semiconductor manufacturing, particularly with his innovative designs for wafer support systems. His work has led to advancements that enhance the efficiency and effectiveness of wafer processing.
Latest Patents
Frank B Van Bilsen holds a patent for a wafer support system. This system comprises a segmented susceptor with top and bottom sections, featuring gas flow passages. The design includes a plurality of spacers that support a wafer in a spaced relationship with respect to the recess. A sweep gas is introduced to the bottom section, traveling through the gas flow passages to exit in a circular array of outlets beneath the wafer. This innovative approach prevents back-side contamination of the wafer, ensuring higher quality in semiconductor production.
Career Highlights
Frank B Van Bilsen is associated with Asm America, Inc., where he has applied his expertise in developing advanced wafer support technologies. His career is marked by a commitment to improving semiconductor manufacturing processes through innovative engineering solutions.
Collaborations
Throughout his career, Frank has collaborated with notable colleagues, including Michael W Halpin and Mark R Hawkins. These partnerships have contributed to the development of cutting-edge technologies in the semiconductor industry.
Conclusion
Frank B Van Bilsen's contributions to wafer support systems exemplify the importance of innovation in semiconductor manufacturing. His patented designs continue to influence the industry, showcasing his role as a key inventor in this field.