Frank A Bose

Title: Frank A. Bose: Innovator in Plasma Processing Technology

Introduction

Frank A. Bose is a notable inventor based in Wettingen, Switzerland. He has made significant contributions to the field of plasma processing technology, holding 2 patents that enhance the efficiency and control of plasma systems. His work is particularly relevant in industries that rely on precise plasma processing for manufacturing and material treatment.

Latest Patents

One of Frank A. Bose's latest patents focuses on power control and delivery in plasma processing equipment. This invention relates to a system and method for controlling and delivering radio frequency power in plasma process systems. The invention monitors various parameters such as power, voltage, current, phase, impedance, harmonic content, and direct current bias of the radio frequency energy delivered to the plasma chamber. Additionally, it allows for the control of the plasma mode of operation by creating either a capacitively or inductively biased radio frequency source impedance. A radio frequency circulator is employed to prevent reflected power from damaging the power source, while also dissipating reflected power in a termination resistor. This termination resistor effectively manages harmonic energy caused by plasma non-linearities.

Another significant patent by Bose is centered on achieving uniform and repeatable plasma processing. This invention utilizes dynamic control and delivery of radio frequency power in plasma process systems to enhance the repeatability and uniformity of the plasma process. By monitoring the same parameters as mentioned in his previous patent, the system can control or characterize the plasma load. The dynamic pro-active control of radio frequency power characteristics during plasma formation enhances the uniformity of the plasma, allowing for more precise and controllable processing of workpieces.

Career Highlights

Frank A. Bose has had a distinguished career, working at LSI Logic Corporation, where he has been able to apply his innovative ideas in practical settings. His expertise in plasma processing technology has made him a valuable asset to the company and the industry at large.

Collaborations

Throughout his career, Frank has collaborated with notable colleagues such as Roger Patrick and Philippe Schoenborn. These collaborations have likely contributed to the advancement of technology in their respective fields.

Conclusion

Frank A. Bose's contributions to plasma processing technology through his patents demonstrate his commitment to innovation and excellence. His work continues to influence the industry, paving the way for advancements in manufacturing processes.