Feng Xu

Title: The Innovations of Feng Xu

Introduction

Feng Xu is a notable inventor based in Sichuan, China. He has made significant contributions to the field of optics, particularly in the development of focus detection apparatuses for projection lithography systems. His work is characterized by a commitment to precision and efficiency.

Latest Patents

Feng Xu holds a patent for a focus detection apparatus for a projection lithography system. This innovative apparatus includes a laser, a focus optical unit for focusing the emitted laser beam, and a force detection unit that reflects the focused laser beam. Additionally, it features a position detection unit that detects variations in the position of a light spot formed by the reflected laser beam. The system outputs a strength signal indicating the interaction force between the force detection unit and the object. A differential amplifier outputs a Z-direction differential signal based on the strength signal and a reference signal. Furthermore, a Z-direction feedback control unit performs feedback control, while a scan signal generator outputs a signal for controlling the movement of the stage in the XY plane. This focus detection apparatus is noted for its high precision, efficiency, and process applicability. Feng Xu has been granted 1 patent for this invention.

Career Highlights

Feng Xu has worked with prestigious institutions such as the Chinese Academy of Sciences and the Institute of Optics and Electronics. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in optical technology.

Collaborations

Feng Xu has collaborated with notable colleagues, including Lixin Zhao and Song Hu. Their joint efforts have furthered research and development in the field of optics.

Conclusion

Feng Xu's contributions to the field of optics, particularly through his patented focus detection apparatus, highlight his innovative spirit and dedication to advancing technology. His work continues to influence the industry and inspire future inventions.