Feixia Pan

Title: The Innovative Contributions of Feixia Pan in MEMS Technology

Introduction

Feixia Pan is a prominent inventor based in Webster, NY, who has made significant strides in the field of micro-electromechanical systems (MEMS). With a total of five patents to his name, Pan has focused on advancing the technology behind fluid ejection mechanisms, showcasing his innovative spirit and technical expertise.

Latest Patents

Pan's latest patents include a "Surface Micromachining Process of MEMS Ink Jet Drop Ejectors on Glass Substrates." This patent describes a method and device wherein a glass substrate is prepared by depositing a thin layer of chromium, which is then patterned to form a deflection electrode and interconnect leads. A sacrificial layer of aluminum is deposited and patterned to define anchor regions. Following this, a thick layer of chromium is applied and patterned to create a membrane, which is subsequently released by etching the sacrificial layer.

Another notable patent is the "Method of Fabricating a Micro-Electro-Mechanical Fluid Ejector." This invention presents a micro-electromechanical fluid ejector that can be efficiently manufactured using a standard polysilicon surface micromachining process. The technique allows for batch fabrication at a low cost while ensuring compatibility with integrated microelectronics, facilitating the monolithic integration of actuators and addressing electronics. Furthermore, this invention discloses both voltage drive mode and charge drive mode for the power source that actuates the deformable membrane.

Career Highlights

Feixia Pan is currently affiliated with Xerox Corporation, a leading company known for its innovations in printing technology and document management. His work has substantially enhanced the capabilities of MEMS devices, contributing to advancements in various applications, including inkjet printing technologies.

Collaborations

Pan has worked alongside notable colleagues, including Joel A. Kubby and Jingkuang Chen. Their collaborative efforts have further propelled innovative research and development in MEMS technologies, showcasing the power of teamwork in the advancement of scientific inquiry.

Conclusion

With a strong portfolio of patents and a commitment to innovation, Feixia Pan stands as a significant figure in the realm of MEMS technology. His work not only reflects his personal contributions but also highlights the ongoing evolution of engineering and technology through collaboration and creativity. As industries continue to evolve, Pan's inventions will likely play a crucial role in shaping future advancements within the field.