Sunnyvale, CA, United States of America

Eva L Benitez


Average Co-Inventor Count = 7.0

ph-index = 2

Forward Citations = 26(Granted Patents)


Company Filing History:


Years Active: 2004-2006

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2 patents (USPTO):Explore Patents

Title: Eva L Benitez: Innovator in Optical Inspection Technologies

Introduction

Eva L Benitez is a prominent inventor based in Sunnyvale, CA, known for her contributions to optical inspection technologies. With a focus on enhancing the detection of anomalies in semiconductor wafers, she has made significant strides in the field of inspection systems. Her innovative approaches have led to the development of patented technologies that improve the accuracy and efficiency of defect detection.

Latest Patents

Eva L Benitez holds 2 patents that showcase her expertise in optical inspection. One of her latest patents is titled "Apparatus and methods for optically inspecting a sample for anomalies." This patent discloses methods and apparatus for detecting a wide dynamic range of intensity values from a beam originating from a sample, such as a semiconductor wafer. The inspection system provides detected output signals with wide dynamic ranges, which can be analyzed to determine the presence of defects. The system includes a beam generator that directs an incident beam towards a sample surface and a detector that captures the response from the sample. The detector features a sensor that generates a detected signal and a non-linear component that produces a non-linear detected signal. Additionally, the system incorporates an analog-to-digital converter to digitize the detected signal for further analysis.

Career Highlights

Eva L Benitez is currently employed at Kla-Tencor Technologies Corporation, where she continues to innovate in the field of optical inspection. Her work has significantly contributed to advancements in semiconductor manufacturing processes.

Collaborations

Throughout her career, Eva has collaborated with notable colleagues, including Ralph C Wolf and John D Greene. These collaborations have fostered an environment of innovation and have led to the successful development of new technologies.

Conclusion

Eva L Benitez is a trailblazer in the field of optical inspection technologies, with a strong focus on improving defect detection in semiconductor manufacturing. Her patents and career achievements reflect her dedication to innovation and excellence in her field.

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