EunSook Lee

Title: EunSook Lee - Innovator in Semiconductor Technology

Introduction

EunSook Lee is a prominent inventor based in Ansan, South Korea. She has made significant contributions to the field of semiconductor technology, particularly through her innovative methods in thin-film deposition.

Latest Patents

EunSook Lee holds 1 patent for her invention titled "Thin-film deposition method and manufacturing method of semiconductor device." This patent describes a method of depositing a thin film with desired etching characteristics while enhancing the loss amount and loss uniformity of a lower film. The process involves two main operations: the first operation deposits a portion of the thin film through a series of cycles involving source gas, reactant gas, and plasma supply. The second operation completes the thin film deposition with a different cycle, ensuring that the supply time of the source gas in the first operation is longer than in the second.

Career Highlights

EunSook Lee is currently employed at ASML Holding B.V., where she continues to advance her research and development in semiconductor technologies. Her work has been instrumental in improving manufacturing processes and enhancing the performance of semiconductor devices.

Collaborations

EunSook collaborates with notable colleagues, including ManSu Lee and SeungWoo Choi, who contribute to her innovative projects and research initiatives.

Conclusion

EunSook Lee's contributions to semiconductor technology through her patented methods exemplify her role as a leading inventor in the field. Her work not only advances technology but also sets a foundation for future innovations in semiconductor manufacturing.