This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Samsung Electronics Ltd.. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Eunkyeom Kim - Innovator in Wafer Processing Technology
Introduction
Eunkyeom Kim is an inventor based in Suwon-si, South Korea. He has made significant contributions to the field of wafer processing technology. Although he currently holds no granted patents, his innovative ideas are reflected in his latest patent applications.
Latest Patent Applications
1. **WAFER TRANSFER APPARATUS** - This application describes a wafer transfer apparatus that includes a blade with a wafer accommodation area designed to support a wafer. It features a minimum contact area (MCA) support on the blade, along with a plurality of microstructures on the upper surface of the MCA support. Each microstructure has an upper end that serves as a contact area for the wafer, with a porous adsorption material positioned between the microstructures, ensuring effective wafer handling.
2. **COVER WAFER AND METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME** - This application outlines a method for cleaning a substrate processing apparatus that accommodates a process wafer. The method involves placing a cover wafer on the substrate support, fixing it using the internal electrode, and performing plasma cleaning of the processing space. The cover wafer is made of silicon carbide (SiC) and is designed to enhance the cleaning process while maintaining the integrity of the substrate support.
Conclusion
Eunkyeom Kim's innovative approaches in wafer processing technology demonstrate his potential as an inventor. His latest patent applications reflect his commitment to advancing the field, even in the absence of granted patents.