Location History:
- Los Altos, CA (US) (1999 - 2002)
- Sunnyvale, CA (US) (2001 - 2002)
- San Jose, CA (US) (2005)
Company Filing History:
Years Active: 1999-2005
Title: The Innovative Contributions of Eugene Tzou
Introduction
Eugene Tzou is a notable inventor based in San Jose, CA, who has made significant contributions to the field of materials science and engineering. With a total of 5 patents to his name, Tzou has developed innovative methods and materials that have applications in advanced manufacturing processes.
Latest Patents
One of Tzou's latest patents is titled "Undoped and fluorinated amorphous carbon film as pattern mask for metal etch." This invention describes a method for etching a metal layer formed on a substrate to create a metal line. The process involves depositing an amorphous carbon layer on the metal layer, patterning it to provide a mask, and etching the exposed portions of the metal layer. In one embodiment, the metal layer comprises a copper layer, showcasing the practical applications of his work.
Another significant patent is "HDP-CVD deposition of low dielectric constant amorphous carbon film." This invention provides a method for depositing a low dielectric constant amorphous carbon film using high density plasma chemical vapor deposition techniques. The resulting film has a dielectric constant of less than about 3.0 and high thermal stability, making it suitable for ultra-large scale integration structures and devices.
Career Highlights
Eugene Tzou is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His work at Applied Materials has allowed him to focus on developing advanced materials and processes that enhance the performance and efficiency of electronic devices.
Collaborations
Throughout his career, Tzou has collaborated with several talented individuals, including Nitin Khurana and Vince Burkhart. These collaborations have contributed to the advancement of innovative technologies in the field.
Conclusion
Eugene Tzou's contributions to the field of materials science through his patents and work at Applied Materials, Inc. highlight his role as a key innovator. His inventions continue to influence the development of advanced manufacturing processes and materials in the technology sector.