Ernie Allen

Title: Ernie Allen: Innovator in MEMS Technology

Introduction

Ernie Allen is a notable inventor based in Rockport, MA (US). He has made significant contributions to the field of microelectromechanical systems (MEMS) technology. With a total of 2 patents, his work focuses on innovative methods for semiconductor processing.

Latest Patents

Ernie Allen's latest patents include a method of making a MEMS electrostatic chuck. This invention is directed to a method of forming a clamping plate for a multi-polar electrostatic chuck. The method involves forming a first electrically conductive layer over a semiconductor platform and defining a plurality of portions of the first electrically conductive layer which are electrically isolated from one another. Additionally, a first electrically insulative layer is formed over the first electrically conductive layer, featuring a top surface with a plurality of MEMS protrusions extending a first distance therefrom. The invention also includes a voltage control system that applies voltage between the poles to induce an electrostatic force in the clamping plate.

Another significant patent is the MEMS based contact conductivity electrostatic chuck. This invention provides a method for clamping and processing a semiconductor substrate using a semiconductor processing apparatus. The multi-polar electrostatic chuck includes a semiconductor platform with protrusions that define gaps, and a surface roughness of the protrusions is less than 100 Angstroms. The electrostatic chuck is designed to control the contact heat transfer coefficient based on the contact pressure between the substrate and the protrusions.

Career Highlights

Ernie Allen is currently employed at Axcelis Technologies, Inc., where he continues to innovate in the field of semiconductor technology. His work has contributed to advancements in the efficiency and effectiveness of semiconductor processing.

Collaborations

Some of his notable coworkers include Peter Lawrence Kellerman and Shu Qin. Their collaborative efforts have further enhanced the innovative environment at Axcelis Technologies, Inc.

Conclusion

Ernie Allen's contributions to MEMS technology and semiconductor processing demonstrate his commitment to innovation. His patents reflect a deep understanding of the complexities involved in these fields. His work continues to influence the industry and pave the way for future advancements.