Company Filing History:
Years Active: 2006-2010
Title: Eric Kuang: Innovator in Semiconductor Technology
Introduction
Eric Kuang is a prominent inventor based in Shanghai, China. He has made significant contributions to the field of semiconductor technology. With a total of 2 patents to his name, his work focuses on improving methods for electrical contact in semiconductor manufacturing.
Latest Patents
Eric's latest patents include a method for making an opening for electrical contact by etch back profile control. This innovative method involves performing a first etch through a first dielectric layer to create a first via and a second dielectric layer. The process includes filling the first via with a BARC material to form a first BARC layer. A second etch is then performed on the first BARC layer to create a second BARC layer. The second etch features a first etch rate in a peripheral region and a second etch rate in a central region of the second BARC layer. The design ensures that the first etch rate is larger than the second, resulting in a convex shape for the top surface of the second BARC layer. Furthermore, the method includes a third etch through a second dielectric layer to form a trench and a third BARC layer, which is free from spikes around its side surface. The final step involves removing the third BARC layer to create a second via.
Career Highlights
Eric Kuang is currently employed at Semiconductor Manufacturing International Corporation, where he continues to innovate in the semiconductor industry. His work has been instrumental in advancing etch back profile control techniques, which are crucial for the efficiency and effectiveness of semiconductor devices.
Collaborations
Eric collaborates with talented coworkers, including Han Ming Wu and Wei Song, who contribute to the innovative environment at Semiconductor Manufacturing International Corporation.
Conclusion
Eric Kuang is a key figure in semiconductor innovation, with a focus on enhancing electrical contact methods through his patented technologies. His contributions are vital to the ongoing advancements in the semiconductor industry.