Company Filing History:
Years Active: 2001-2005
Title: Innovations by Eric Alan Barrett
Introduction
Eric Alan Barrett is a notable inventor based in Mesa, AZ (US). He has made significant contributions to the field of wafer support systems, holding a total of 3 patents. His work focuses on improving the design and functionality of wafer holders, which are essential in various technological applications.
Latest Patents
One of his latest patents is the "Self-centering wafer support system." This invention discloses improvements in the design of a low mass wafer holder. The enhancements include the use of peripherally located, integral lips that space a wafer or other substrate above the base plate of the wafer holder. This design creates a uniform gap between the wafer and the base plate, which helps temper rapid heat exchanges and allows gas to flow between the wafer and wafer holder during pick-up. Additionally, it keeps the wafer holder thermally coupled with the wafer while reducing thermal disturbances from lip contact. Gas flow during pick-up can be facilitated through radial channels in the wafer holder's upper surface or through backside gas passages. The design also features a thicker ring at the wafer holder perimeter, which can be an independent piece to accommodate stresses from thermal gradients. Self-centering mechanisms are included to maintain the wafer holder's alignment relative to a spider that experiences differential thermal expansion.
Career Highlights
Eric Alan Barrett is currently employed at Asm America, Inc., where he continues to innovate in the field of wafer support systems. His work has been instrumental in advancing the technology used in semiconductor manufacturing and other related industries.
Collaborations
Throughout his career, Barrett has collaborated with notable colleagues, including Ivo Johannes Raaijmakers and Loren R Jacobs. These collaborations have contributed to the development of cutting-edge technologies in wafer handling and support.
Conclusion
Eric Alan Barrett's contributions to the field of wafer support systems demonstrate his commitment to innovation and excellence. His patents reflect a deep understanding of the technical challenges in semiconductor manufacturing, and his work continues to influence the industry positively.