Eri Fujita

Title: Eri Fujita: Innovator in Substrate Processing Technology

Introduction

Eri Fujita is a notable inventor based in Kyoto, Japan, recognized for his contributions to substrate processing technology. With a total of four patents to his name, Fujita has made significant advancements in the field, particularly in the design and functionality of substrate processing apparatuses.

Latest Patents

Fujita's latest patents include a substrate processing apparatus and a substrate processing method. The substrate processing apparatus features common piping that guides a processing liquid to a branching portion, along with supply piping that directs the liquid to a chemical liquid nozzle. It also includes return piping that channels the processing liquid back from the branching portion and a discharge valve that adjusts the flow rate of the processing liquid. This innovative discharge valve can hold a valve element at multiple positions, including a discharge execution position and a discharge stop position, optimizing the flow rates for various processing needs.

Another significant patent is the processing liquid supplying apparatus, which is designed to supply a processing liquid to a processing unit that handles substrates. This apparatus consists of a supply pipe connected to a processing liquid tank, a return pipe for recycling the liquid, and multiple heating and cooling units to maintain optimal temperatures. Additionally, a first filter is integrated to remove particles from the processing liquid, ensuring high-quality output.

Career Highlights

Eri Fujita is currently employed at Screen Holdings Co., Ltd., where he continues to innovate and develop new technologies in substrate processing. His work has been instrumental in enhancing the efficiency and effectiveness of processing methods used in various applications.

Collaborations

Fujita collaborates with talented colleagues, including Ayumi Higuchi and Shota Iwahata, who contribute to the innovative environment at Screen Holdings Co., Ltd. Their teamwork fosters creativity and drives advancements in substrate processing technologies.

Conclusion

Eri Fujita's contributions to substrate processing technology through his patents and collaborative efforts highlight his role as a key innovator in the field. His work continues to influence the industry and pave the way for future advancements.