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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11094564 B1

PDFFull Text
Date of Patent:
Aug. 17, 2021

Filed:

Oct. 24, 2018

Processing liquid supplying apparatus, substrate processing apparatus and processing liquid supplying method

Applicant:

Screen Holdings Co., Ltd., Kyoto, JP;

Inventors:

Shota Iwahata, Kyoto, JP;

Ayumi Higuchi, Kyoto, JP;

Eri Fujita, Kyoto, JP;

Yoshiyuki Fujitani, Kyoto, JP;

Masako Mano, Kyoto, JP;

Yusuke Takematsu, Kyoto, JP;

Yosuke Okuya, Kyoto, JP;

Assignee:

SCREEN Holdings Co., Ltd.;

Attorney:

Ostrolenk Faber LLP

Primary Examiner:

Walter D Griffin

Assistant Examiner:

Cameron J Allen

Int. Cl.
CPC ...
H01L 21/67 (2006.01); B08B 3/14 (2006.01); C25D 17/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67017 (2013.01); B08B 3/14 (2013.01); C25D 17/02 (2013.01); H01L 21/6715 (2013.01); H01L 21/67051 (2013.01); H01L 21/67109 (2013.01); H01L 21/67178 (2013.01); H01L 21/67248 (2013.01); H01L 21/67253 (2013.01);
Abstract

A processing liquid supplying apparatus supplies a processing liquid to a processing unit which processes a substrate. The processing liquid supplying apparatus includes a supply pipe to which a processing liquid inside a processing liquid tank that stores the processing liquid is fed and which supplies the processing liquid, which is fed from the processing liquid tank, to the processing unit, a return pipe which is branched and connected to the supply pipe to return a processing liquid inside the supply pipe to the processing liquid tank, a first heating unit which heats a processing liquid inside an upstream-side portion to be heated that is set in the supply pipe upstream from a branched position to which the return pipe is connected, a second heating unit which heats a processing liquid inside a downstream-side portion to be heated that is set in the supply pipe downstream from the branched position, a cooling unit which cools a processing liquid inside a portion to be cooled that is set in the return pipe, and a first filter which is interposed in the supply pipe upstream from the upstream-side portion to be heated and removes particles in a processing liquid.

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