Oume, Japan

Emiko Uda


Average Co-Inventor Count = 7.0

ph-index = 1

Forward Citations = 53(Granted Patents)


Company Filing History:


Years Active: 1997

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1 patent (USPTO):Explore Patents

Title: Emiko Uda: Innovator in Focused Energy Beam Processing

Introduction: Emiko Uda is a notable inventor based in Oume, Japan, who has contributed significantly to the field of energy processing. With an impressive patent under her belt, she exemplifies the spirit of innovation within advanced research environments.

Latest Patents: Emiko Uda is recognized for her patent titled "Processing method and apparatus using focused energy beam." This innovative process utilizes a focused energy beam, such as an ion or electron beam, to conduct localized energy beam processing in a specially designed etching gas atmosphere. A key feature of her invention involves the use of a mixed gas that differs in composition from traditional etching gases. This unique gas is uniformly supplied to the etching area, where at least one component is a spontaneous reactive gas, enabling isotropic etching of materials that previously presented challenges when subjected to conventional single etching gases.

Career Highlights: Emiko Uda is currently affiliated with Hitachi, Ltd., where she continues to push the boundaries of technology and innovation. Her work in developing advanced processing methods showcases her dedication to enhancing material processing techniques, particularly in areas that demand precision and control.

Collaborations: Throughout her career, Emiko has collaborated with notable colleagues, including Junzou Azuma and Fumikazu Itoh. These partnerships have likely enriched her research and contributed to her innovative approaches in the laboratory.

Conclusion: Emiko Uda's contributions to the field of focused energy beam processing mark her as a leading inventor in material science. Her patent not only addresses existing challenges but also paves the way for future advancements in etching technology. Uda's work serves as an inspiring example of how innovation can create new possibilities in engineering and technology.

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