Company Filing History:
Years Active: 2001-2003
Title: Emerson Derryck Settles: Innovator in Plasma Reactor Technology
Introduction
Emerson Derryck Settles is an accomplished inventor based in Sunnyvale, California. He holds a noteworthy portfolio of three patents that focus on enhancing the functionality and efficiency of plasma reactors in various applications. His innovative contributions to the field have been significant, especially in methods involving gas injection and species alteration.
Latest Patents
Emerson's most recent patents center around an "Apparatus and method for injecting and modifying gas concentration of a meta-stable or atomic species in a downstream plasma reactor." This invention outlines a method for injecting gas into a plasma reactor and customizing the distribution of an active species generated by the remote plasma source over substrates or wafers. The designs allow for various distribution methods, whether uniform, wafer-edge concentrated, or wafer-center concentrated, utilizing contoured plates or profilers.
The apparatus features a coaxial injector tube designed for the simultaneous injection of activated and non-activated gas species. This system permits gases to be delivered in an axially symmetric manner, enabling one gas to be excited in a high-density RF plasma while ensuring the other remains unaffected by plasma exposure. The innovations Emerson has introduced in this field have potential implications in numerous applications, enhancing both process reliability and performance.
Career Highlights
Emerson Derryck Settles is currently associated with Novellus Systems Incorporated, a company that plays a vital role in semiconductor manufacturing technology. His work stands out due to the sophisticated approach taken in the design and application of plasma reactors. With three patents to his name, Emerson reflects a dedicated career committed to advancing technological frontiers in his field.
Collaborations
Throughout his career at Novellus Systems, Emerson has closely collaborated with esteemed colleagues such as Ronald Allan Powell and Gabriel I Font-Rodriguez. These partnerships have allowed for a collective exchange of ideas and expertise, thereby further advancing the research and development initiatives within the company.
Conclusion
Emerson Derryck Settles is a remarkable inventor whose contributions to plasma reactor technology are redefining industry standards. Through his innovative patents, he continues to shape the future of gas injection methodologies and plasma processing, setting a benchmark for upcoming engineers and researchers in the field.