Company Filing History:
Years Active: 2008
Title: Elvino M Da Silveira: Innovator in High-Speed Lithography
Introduction
Elvino M Da Silveira is a notable inventor based in North Andover, MA (US). He has made significant contributions to the field of lithography, particularly in the production of circuit patterns on silicon wafers. His innovative approach has paved the way for advancements in integrated circuit packaging.
Latest Patents
Elvino holds a patent for a high-speed lithography machine and method. This invention allows for the rapid production of circuit patterns on silicon wafers or similar substrates. The machine is designed for applications such as printing integrated circuit (IC) packaging patterns onto wafers before separating IC chips. It features projection cameras that simultaneously project images onto substrates carried on an X, Y, θ stage. These cameras include independent alignment systems, light sources, and controls for focus, image placement, image size, and dose. In one embodiment, each camera is equipped with a 6-axis reticle chuck that corrects image-to-substrate overlay errors. The system also incorporates in-stage metrology sensors and machine software to maintain the correct relationship among the machine's coordinate systems. This allows multiple projection cameras to print simultaneously, even when substrates are slightly misplaced.
Career Highlights
Throughout his career, Elvino has worked with several prominent companies, including Azores Corporation and Rudolph Technologies, Inc. His expertise in lithography has been instrumental in advancing technologies used in the semiconductor industry.
Collaborations
Elvino has collaborated with notable professionals in his field, including Steven D Gardner and Griffith L Resor, III. These collaborations have contributed to the development of innovative solutions in lithography and semiconductor manufacturing.
Conclusion
Elvino M Da Silveira's contributions to high-speed lithography have significantly impacted the semiconductor industry. His innovative patent and career achievements highlight his role as a leading inventor in this field.