Eiryo Tsukioka

Title: Eiryo Tsukioka: Innovator in Semiconductor Technology

Introduction

Eiryo Tsukioka is a prominent inventor based in Tokorozawa, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on advanced methods for fabricating bipolar transistors and manufacturing semiconductor devices.

Latest Patents

One of Tsukioka's latest patents is a "Method of fabricating bipolar transistor using self-aligned polysilicon." This innovative approach involves a micronized structure for high-speed LSI, utilizing self-alignment technology. A barrier insulating film is strategically buried around the emitter layer, deeper than the junction level between the active base layer and the collector layer. The process includes forming a polysilicon film pattern that defines the active base region, with a photoresist layer converted to a carbonized layer through ion implantation. The formation of a micronized emitter layer is achieved by employing polysilicon-emitter technology, with ion implantation performed prior to polysilicon film deposition.

Another significant patent is the "Method of manufacturing semiconductor device." This method outlines a process where a buffer oxide film, an oxidation-resistant film, and a first poly-Si film containing a p-type impurity are successively formed on the n-type collector region. A protective oxide film is created using CVD, followed by the formation of an opening that reaches the oxidation-resistant film. The oxidation-resistant film is then etched to expose the buffer oxide film, which is subsequently removed. The process concludes with heat treatment under an oxidative atmosphere to form a thermal oxide film, facilitating the diffusion of the p-type impurity into the collector region.

Career Highlights

Eiryo Tsukioka is associated with Kabushiki Kaisha Toshiba, where he has been instrumental in advancing semiconductor technologies. His innovative methods have contributed to the development of high-performance electronic devices.

Collaborations

Tsukioka has collaborated with notable colleagues, including Hiroomi Nakajima and Nobuyuki Itoh. Their combined expertise has further enhanced the research and development efforts in semiconductor technology.

Conclusion

Eiryo Tsukioka's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence advancements in electronic devices and manufacturing processes.