Eiji Okuno

Title: Eiji Okuno: Innovator in Substrate Processing Technology

Introduction

Eiji Okuno is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 4 patents. His work focuses on improving the efficiency and effectiveness of substrate handling and processing systems.

Latest Patents

Okuno's latest patents include innovative designs for substrate processing apparatuses and methods. One of his notable inventions is a substrate processing apparatus that features a cassette placing table, a first transfer mechanism with a substrate holding hand, and a substrate processing unit. This apparatus is designed to execute predetermined processes on substrates while ensuring precise transfer between mechanisms. Another significant patent is for a substrate holding device that incorporates a motor-driven rotating shaft and a clean gas supply mechanism. This design enhances the processing environment by maintaining cleanliness and efficiency during substrate handling.

Career Highlights

Throughout his career, Eiji Okuno has been associated with Dainippon Screen Mfg. Co., Ltd., a leading company in the field of semiconductor manufacturing equipment. His innovative contributions have played a crucial role in advancing the technology used in substrate processing.

Collaborations

Okuno has collaborated with notable colleagues, including Takeshi Yoshida and Takashi Hara. Their combined expertise has further propelled advancements in substrate processing technologies.

Conclusion

Eiji Okuno's work in substrate processing technology exemplifies innovation and dedication to improving manufacturing processes. His patents reflect a commitment to enhancing efficiency and cleanliness in substrate handling, making a significant impact in the industry.