Company Filing History:
Years Active: 2009-2012
Title: The Innovative Contributions of Edward Strepka
Introduction
Edward Strepka is a notable inventor based in Brentwood, CA (US). He has made significant contributions to the field of material deposition technology, holding a total of 3 patents. His work focuses on advanced systems for processing multiple workpieces in vacuum environments.
Latest Patents
Strepka's latest patents include a multi-station sputtering and cleaning system. This innovative system is designed for depositing materials on multiple workpieces, such as wafers and display panels, simultaneously within a vacuum chamber. The system features a sputtering chamber and a separate pre-clean chamber, allowing for the transfer of wafers by a robotic arm without breaking the vacuum. The wafers are mounted on a rotating pallet, which is firmly fixed to a rotatable table in the sputtering chamber. This design incorporates copper tubing to couple RF energy to the wafers, while a liquid running through the tubing regulates their temperature. The system allows for concurrent deposition of materials from multiple targets, ensuring uniform target erosion and deposition on the wafers.
Another notable patent involves a rotating pallet in the sputtering system, which also facilitates the deposition of materials on multiple workpieces. The design includes multiple magnets in the magnetron assembly that oscillate over their respective targets, promoting uniform deposition. This innovative approach enhances the efficiency and effectiveness of the material deposition process.
Career Highlights
Edward Strepka is currently employed at Tango Systems, Inc., where he continues to develop cutting-edge technologies in the field of sputtering and material deposition. His expertise and innovative mindset have positioned him as a key player in advancing these technologies.
Collaborations
Strepka has collaborated with talented individuals such as Ravi Mullapudi and Dean Smith, contributing to the success of various projects within his company.
Conclusion
Edward Strepka's contributions to the field of material deposition technology are noteworthy. His innovative patents and collaborative efforts continue to shape advancements in this area, showcasing his dedication to improving processing systems.