Company Filing History:
Years Active: 2001
Title: Edward M Middlebrook: Innovator in Semiconductor Cleaning Technology
Introduction
Edward M Middlebrook is a notable inventor based in Kissimmee, FL (US). He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of cleaning processes for contaminated chambers.
Latest Patents
Middlebrook holds a patent for an innovative method titled "In situ dry cleaning process for poly gate etch." This invention provides a method for cleaning a contaminated chamber used in the manufacture of semiconductor devices. The process involves injecting a gas mixture of a fluorine-containing gas and an inert gas into the contaminated chamber under pressure. Additionally, it includes radiating the chamber with radio frequency during the injection and removing volatile by-products or solid particulates through pump-purge cycles.
Career Highlights
Middlebrook is associated with Lucent Technologies Inc., where he has applied his expertise in semiconductor technology. His work has been instrumental in advancing cleaning methods that enhance the efficiency and effectiveness of semiconductor device manufacturing.
Collaborations
Some of his notable coworkers include Larry Bruce Fritzinger and Cynthia C Lee, who have collaborated with him on various projects within the semiconductor industry.
Conclusion
Edward M Middlebrook's contributions to semiconductor cleaning technology exemplify innovation in the field. His patent reflects a commitment to improving manufacturing processes, showcasing the importance of effective cleaning methods in semiconductor production.