Doreen Yong

Title: Doreen Yong: Innovator in Microwave Plasma Technology

Introduction

Doreen Yong is a notable inventor based in Singapore, recognized for his contributions to the field of semiconductor manufacturing. He has developed innovative methods that enhance the efficiency and effectiveness of etching processes in silicon-based materials.

Latest Patents

Doreen Yong holds a patent for "Low temperature selective etching of silicon nitride using microwave plasma." This invention includes a method of etching a 3D structure, which involves providing the structure in a microwave plasma chamber. The method utilizes alternating layers of silicon oxide and silicon nitride over a substrate. It also incorporates the flow of specific gases, including sulfur and fluorine, into the chamber, along with an inert gas. The etching process achieves a selectivity of silicon nitride to silicon oxide of 50:1 or greater, showcasing the effectiveness of his innovative approach.

Career Highlights

Doreen Yong is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work focuses on advancing technologies that improve manufacturing processes and product quality. With a patent portfolio that includes 1 patent, he has made significant strides in his field.

Collaborations

Doreen has collaborated with talented professionals such as Thai Cheng Chua and Christian Valencia, contributing to the development of cutting-edge technologies in semiconductor manufacturing.

Conclusion

Doreen Yong's innovative work in microwave plasma technology has positioned him as a key figure in the semiconductor industry. His contributions continue to influence advancements in manufacturing processes, demonstrating the importance of innovation in technology.