This inventor holds 1 USPTO granted patent. Top assignee: Samsung Electronics Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Dongyun Yeo and His Electrostatic Chuck Patent
Introduction
Dongyun Yeo is an inventor associated with Suwon-si, South Korea, and Samsung Electronics Co., Ltd. His patent work includes an invention concerning the design and fastening of an electrostatic chuck.
Latest Patents
Yeo is credited with 1 patent, titled “Electrostatic Chuck.” The invention describes a cooling plate with a cooling flow path, an insulating plate positioned on the cooling plate, and an upper plate fixed to the cooling plate. A fastening member passes through the cooling plate and couples to a fastening portion on the underside of the upper plate. Its movement is constrained only in a direction that intersects the upper plate’s upper surface.
Career Highlights
Yeo’s listed patent is associated with Samsung Electronics Co., Ltd. The invention focuses on the structure and fastening arrangement of an electrostatic chuck.
Collaborations
The provided information lists Inseok Seo and Minsung Kim as Yeo’s coworkers. Their specific roles in the patent or related work are not stated.
Conclusion
Dongyun Yeo’s recorded invention addresses an electrostatic chuck’s cooling-plate assembly and fastening structure, reflecting his patent work associated with Samsung Electronics Co., Ltd.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile