This inventor holds 3 USPTO granted patents and 8 published patent applications. Top assignee: Jusung Engineering Co., Ltd.. Active years: 2020-2024.
Company Filing History:
Years Active: 2020-2024
Title: Innovations of Dong Won Seo
Introduction
Dong Won Seo is a notable inventor based in Gwangju-si, South Korea. He has made significant contributions to the field of substrate processing technology. With a total of 3 patents to his name, his work focuses on improving the efficiency and safety of exhaust gas processing.
Latest Patents
One of his latest patents is a substrate processing apparatus having an exhaust gas decomposer, along with an exhaust gas processing method. This invention discloses a substrate processing apparatus that includes an exhaust gas decomposition module. The module is designed to decompose a source gas that is exhausted from a process chamber, effectively breaking down the ligand of the source gas. The invention ensures that the ligand and the decomposed source gas can be stabilized by reacting with separately supplied oxygen or nitrogen oxides. This process allows the mixed gas to flow into the exhaust pump without causing any deposits or explosions within the pump.
Career Highlights
Dong Won Seo is currently employed at Jusung Engineering Co., Ltd., where he continues to innovate in the field of substrate processing. His work has been instrumental in advancing technologies that enhance the safety and efficiency of industrial processes.
Collaborations
He has collaborated with notable coworkers, including Heon Do Kim and Chul-Joo Hwang, contributing to various projects that aim to improve substrate processing technologies.
Conclusion
Dong Won Seo's contributions to substrate processing technology highlight his innovative spirit and dedication to improving industrial processes. His patents reflect a commitment to safety and efficiency in exhaust gas management.